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              6寸藍寶石襯底

              2018-10-29

              藍寶石晶片

              Item

              6"

              Unit

               Dimension

              Diameter:

              150 ± 0.2

              mm

              Thickness:

              1300 ± 20

              um

              Primary Flat:

              47.51.0

              mm

              Orientation

              Surface-cut:

              C plane : Tilt 0.2°±0.1° in M axis /

              ~

              Primary Flat:

              A plane : 0° ± 0.15°

              ~

              Flatness

              Bow:

               0 ~ (-10)

              um

              Warp:

               20

              um

              Total Thickness Variation (TTV):

               10

              um

              LTV

              2.5

              um

              Front side Roughness

              0.2

              nm

              Back side Roughness

              0.8-1.2

              um

              Cleanliness

              No particles and fingerprints

              ~

              4.Material Quality

              High-purity mono-crystal Al2O3

              ~

              5.Package

              Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

              ~

              6.Trace Ability

              Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

              ~

              7.Laser Mark

              Front or Back side

              ~


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