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              圖形化襯底DPSS

              2014-09-02

              2"DPSS

              Inspection

              Item

              Detail

              Spec

              Description

              SEM
              Image
              Inspection

              Width

              Average

              2.70±0.15um

              Flat-top shaped pattern not allowed

              Unif.

              5%

              Height

              Average

              1.65±0.15um

              Unif.

              5%

              Scope Inspection

              Particle

              50um*

              100ea

              No visible particle on wafer
              The total lens should be less than 3mm

              [50um250um]*

              30ea

              [250um,500um]*

              20ea

              [500um,1500um]*

              10ea

              1500um*

              0

              Pattern Missing

              50um*

              80ea

              The total length shoud be less than 2mm

              [50um250um]*

              30ea

              [250um,500um]*

              15ea

              [500um,1500um]*

              8ea

              1500um*

              0

              Pattern Fail

              50um*

              80ea

              [50um250um]*

              30ea

              [250um,500um]*

              15ea

              [500um,1500um]*

              8ea

              1500um*

              0

              Scratch

              1.2mm

              7ea

              width60um and lenth1.2mm should be judged as 1ea
              if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

              Edge Bead

              Edge Bead

              1.8mm

              The pattern failed within the 1.8mm area from the wafer edge should not be counted
              The non-pattern area should be less than1mm from the wafer edge

              Abnormal Shape

              Abnormal Shape

              3%

              Total area of abormal shape pattern should be less than 3%

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